Tanaka Kikinzoku Group Products Guide
Top Page Objective·Applications Contents by Industry Precious metals phyisical properties data
Objective·Application
Precious Metal Film Deposition
A-1 Sputtering Targets and Vapor Deposition Materials
A-2 Thick Film Pastes and Precious Metal Powders
A-3 Various Electroplating Processes
A-4 Precious Metal Clad Tapes
A-5 Platinum-clad Wires
Electrical Relay and Connection Technology
Joining and Precision Technology
Circuits • Mounting Technology
Equipment and Measuring Divices
Catalysts and Compounds
Precious Metal Recycling


Tanaka Kikinzoku Group
Group Top
Price Information
A-3 Various Electroplating Processes


Advanced chemical processes for customers needs
EEJA has an established reputation for its chemical processing technology, particularly in semiconductor production, and for its high quality.
We can propose the Chemical process that matches the needs of the customer, selecting the solution through sample plating or analysis.

Plating processes for semiconductor application
Process
Metal
Product name
Application
MICROFAB Au Au140
Au620
Au640
Au660
(Au100)
Au bump plating
Au310 Au fine pattern forming
Ni Ni100
Ni200
Ni barrier forming
Cu Cu200 Cu bump plating
Cu250 Cu post plating
Cu300 Cu fine pattern forming
Cu500 Cu via filling
Solder SP200 Solder bump plating
PRECIOUSFAB Au IG7901 Non-cyanide immersion Au plating for electroless nickel
IG7903 Non-cyanide immersion Au plating for electro nickel
Pt Pt1000 DRAM Capacitor formation Pt metals plating
Ru Ru1000 DRAM Capacitor formation Ru metals plating
GALVANO-MEISTER Au GB-1 Au bump plating
GB-2 High speed Au bump plating
Cu CVF-1 Cu via filling for PWB
CVF-5 Cu via filling for PWB



MICROFAB Series for Au bump process
MICROFAB Au140 (Au:10g/L)
Applicable to fine pitch for MF-Au100
MICROFAB Au620 (Au:12g/L)
MF-Au120 capable of high-speed operation
MICROFAB Au640 (Au:14g/L)
Applicable to fine pitch for MF-Au100
MICROFAB Au660 (Au:16g/L)
MF-Au640 capable of high-speed operation
•(*) MICROFAB Au100
Standard solution



LECTROLESS Series for semiconductor packaging
Item/Process
LECTROLESS
Au1100
AU1200
Au1300
FX-1
FX-3
Au
2
2
2
4
2
pH
4.0
4.75
5.8
4.75
4.75
Temp
90
80
90
90
90
Deposit thickness
0.05μm/10min
0.05μm/10min
0.10μm/10min
0.50μm/30min
Seal Performance
Solder Wettability
Solder Bond Strength
Wire Bonding Property
--
--
--

Application Example for Fin Pattern Au Bump
Liquid display driver IC
MICROFAB Au Series
Application Example for via Hall plating
Compound semiconductor (Ga/As)
MICROFAB Au series
Application Example for Cu post
Wafer Level CSP
MICROFAB Cu series
Application Example for Cu Re-wiring
Wafer Level CSP
MICROFAB Cu, Ni Series & PRECIOUSFAB Series
Application Example for Pt Group Plating Process
Next generation DRAM capacitor electrode formation
PRECIOUSFAB Pt-group Series
Application Example for Cu Plating Process for Filled-via
Via formation on build-up substrate
*Applicable to a wide range of vias φ45-100μm diameter
*Excellent in-plate uniformity
*High throughput




TOP
© 2004 Tanaka Kikinzoku